ION-BOMBARDMENT AND IMPLANTATION AND THEIR APPLICATION TO THIN-FILMS

被引：22

作者：

STROUD, PT

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(72)90340-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / &

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