ION-BOMBARDMENT AND IMPLANTATION AND THEIR APPLICATION TO THIN-FILMS

被引：22
作者：
STROUD, PT
机构：
来源：
THIN SOLID FILMS | 1972年 / 11卷 / 01期
关键词：
D O I：
10.1016/0040-6090(72)90340-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：1 / &
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