HYDROGEN DEPTH PROFILING USING SIMS - PROBLEMS AND THEIR SOLUTIONS

被引：103
作者：
MAGEE, CW
BOTNICK, EM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 01期
关键词：
Compendex;
D O I：
10.1116/1.571015
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
HYDROGEN
引用
收藏
页码：47 / 52
页数：6
相关论文
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