REPRESENTATION OF ION-IMPLANTATION DISTRIBUTIONS IN 2 AND 3 DIMENSIONS

被引：6
作者：
ASHWORTH, DG
BOWYER, MDJ
OVEN, R
机构：
[1] Univ of Kent, Canterbury
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1991年 / 24卷 / 07期
关键词：
D O I：
10.1088/0022-3727/24/7/015
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The representation of two- and three-dimensional point response functions by Pearson frequency distribution curves is discussed for the case of energetic ions implanted into homogeneous, amorphous material. Comparisons are made between the Pearson curves and high-resolution Monte-Carlo simulations. It is shown that no extra information is required to derive the three-dimensional representation once the two-dimensional representation is known.
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页码：1120 / 1125
页数：6
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