CHEMICAL-MECHANICAL POLISHING OF LOW-SCATTER OPTICAL-SURFACES

被引：18
作者：
MCINTOSH, RB
PAQUIN, RA
机构：
来源：
APPLIED OPTICS | 1980年 / 19卷 / 14期
关键词：
D O I：
10.1364/AO.19.002329
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2329 / 2331
页数：3
相关论文
共 20 条
[1]  
BARNES WP, 1975, DESIGN MANUFACTURE A, V65, P3
[2]  
BARNES WP, 1979, OPT ENG, V18, P43
[3]   SCATTERING CHARACTERISTICS OF OPTICAL-MATERIALS [J].
BENNETT, HE .
OPTICAL ENGINEERING, 1978, 17 (05) :480-488
[4]  
BLAKE LH, 1970, SOLID STATE TECHNOL, V13, P42
[5]  
BUCK TM, 1970, SILICON DEVICE PROCE, P419
[6]   BOWL FEED TECHNIQUE FOR PRODUCING SUPERSMOOTH OPTICAL SURFACES [J].
DIETZ, RW ;
BENNETT, JM .
APPLIED OPTICS, 1966, 5 (05) :881-&
[7]  
ELWELL RM, 1973, Patent No. 3738858
[8]   MATERIALS PROBLEMS IN PRODUCTION OF HIGH-QUALITY OPTICAL SURFACES [J].
FRANKS, A .
MATERIALS SCIENCE AND ENGINEERING, 1975, 19 (02) :169-183
[9]  
GARMIRE GP, 1979, SPACE OPTICS IMAGING, V184, P20
[10]  
HERRING RB, 1976, SOLID STATE TECHNOL, V19, P37
12