MOLECULAR STREAM EPITAXY AND THE ROLE OF THE BOUNDARY-LAYER IN CHEMICAL VAPOR-DEPOSITION

被引：5

作者：

KATSUYAMA, T

BEDAIR, SM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期

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D O I：

10.1063/1.341155

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5098 / 5103

页数：6

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