ADSORPTION OF GASES ON A SILICON SURFACE

被引：31

作者：

LAW, JT

FRANCOIS, EE

机构：

来源：

关键词：

D O I：

10.1021/j150537a025

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：353 / 358

页数：6

共 18 条

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