SILICON RIBBON GROWTH VIA RIBBON-TO-RIBBON (RTR) TECHNIQUE - PROCESS UPDATE AND MATERIAL CHARACTERIZATION

被引：23

作者：

GURTLER, RW

BAGHDADI, A

ELLIS, RJ

LESK, IA

机构：

来源：

关键词：

D O I：

10.1007/BF02655648

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：441 / 477

页数：37

共 15 条

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