STRUCTURE MODIFICATION BY ION-BOMBARDMENT DURING DEPOSITION

被引:146
作者
MATTOX, DM
KOMINIAK, GJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 01期
关键词
D O I
10.1116/1.1316677
中图分类号
O59 [应用物理学];
学科分类号
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页码:528 / &
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