DEPTH PROFILING BY PHASE-SHIFT DETECTION IN SCANNING ELECTRON-ACOUSTIC MICROSCOPY

被引：4
作者：
MARTYDESSUS, D
FRANCESCHI, JL
机构：
[1] Centre d'Elaboration des Materiaux et d'Etudes structurales, Labor-atoire d'Optique Electronique, CNRS, Toulouse
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 10期
关键词：
MICROSCOPY; ACOUSTIC MICROSCOPY; MEASUREMENT;
D O I：
10.1049/el:19930563
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method of depth profiling in an object is presented. A modulated electron beam produces acoustic waves which are detected by a piezoelectric sensor. An adapted treatment of the transmitted signal enables cuts to be obtained at different depths within the sample.
引用
收藏
页码：843 / 844
页数：2
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