GENERALIZED PHASE-SHIFTING INTERFEROMETRY

被引：202
|
作者：
LAI, G
YATAGAI, T
机构：
[1] Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1991年 / 8卷 / 05期
关键词：
D O I：
10.1364/JOSAA.8.000822
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe a generalized phase-shifting interferometry for which the reference phases are directly evaluated at each time that the interference fringe data are read. The reference phases are obtained from the additional straight fringes on the interfering plane by the fast-Fourier-transform method. According to error estimation, the repeatabilities in the measurements of optical surfaces are lambda/500 rms, when the generalized algorithm with eight data acquisitions is used.
引用
收藏
页码：822 / 827
页数：6
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