MECHANISM OF SIMS MATRIX EFFECT

被引：216

作者：

DELINE, VR

KATZ, W

EVANS, CA

机构：

[1] UNIV ILLINOIS,DEPT CHEM,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 09期

关键词：

D O I：

10.1063/1.90546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：832 / 835

页数：4

共 13 条

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[8]

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[9] SPUTTERING OF PTSI AND NISI [J].

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[10]

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