ANODIC-OXIDATION OF GAAS IN AN OXYGEN PLASMA GENERATED BY A DC ELECTRICAL-DISCHARGE

被引：35
作者：
KOSHIGA, F
SUGANO, T
机构：
来源：
THIN SOLID FILMS | 1979年 / 56卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(79)90050-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：39 / 49
页数：11
相关论文
共 15 条
[1]   ELECTRICAL-PROPERTIES OF THERMAL OXIDES ON GAAS [J].
BUTCHER, DN ;
SEALY, BJ .
ELECTRONICS LETTERS, 1977, 13 (19) :558-559
[2]   ANODIC OXIDE ON GAAS - QUANTITATIVE CHEMICAL DEPTH PROFILES OBTAINED USING AUGER-SPECTROSCOPY AND NEUTRON-ACTIVATION ANALYSIS [J].
CHANG, CC ;
SCHWARTZ, B ;
MURARKA, SP .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (06) :922-926
[3]   PLASMA OXIDATION OF GAAS [J].
CHANG, RPH ;
SINHA, AK .
APPLIED PHYSICS LETTERS, 1976, 29 (01) :56-58
[4]   DC PLASMA ANODIZATION OF GAAS [J].
CHESLER, LA ;
ROBINSON, GY .
APPLIED PHYSICS LETTERS, 1978, 32 (01) :60-62
[5]  
COLEMAN DJ, 1977, J ELECTROCHEM SOC, V124, P241
[6]   ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].
HASEGAWA, H ;
HARTNAGEL, HL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) :713-723
[7]   THERMAL-OXIDATION OF GAAS [J].
KOSHIGA, F ;
SUGANO, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 :465-469
[8]  
LAW D, 1976, J ELECTROCHEM SOC, V123, P168
[9]   ANODIC-OXIDATION OF GAAS IN AQUEOUS H2O2 SOLUTION [J].
LOGAN, RA ;
SCHWARTZ, B ;
SUNDBURG, WJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1385-1390
[10]  
SCHWARTZ B, 1971, J ELECTROCHEM SOC, V198, P657
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