MOLECULAR-BEAM EPITAXIAL WRITING OF PATTERNED GAAS EPILAYER STRUCTURES

被引:51
作者
TSANG, WT
CHO, AY
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D O I
10.1063/1.90097
中图分类号
O59 [应用物理学];
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页码:491 / 493
页数:3
相关论文
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Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[2]  
TAMI Y, 1971, J ELECTROCHEM SOC, V118, P118
[3]   EXPERIMENTS ON LIGHT WAVES IN A THIN TAPERED FILM AND A NEW LIGHT-WAVE COUPLER [J].
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APPLIED PHYSICS LETTERS, 1971, 18 (09) :398-&
[4]   SELECTIVE AREA GROWTH OF GAAS/ALXGA1-XAS MULTILAYER STRUCTURES WITH MOLECULAR-BEAM EPITAXY USING SI SHADOW MASKS [J].
TSANG, WT ;
ILEGEMS, M .
APPLIED PHYSICS LETTERS, 1977, 31 (04) :301-304