ELECTRODE INFLUENCE ON THE CHARGE-TRANSPORT THROUGH SRTIO3 THIN-FILMS

被引:220
|
作者
DIETZ, GW [1 ]
ANTPOHLER, W [1 ]
KLEE, M [1 ]
WASER, R [1 ]
机构
[1] PHILIPS GMBH,FORSCHUNGSLAB,D-52066 AACHEN,GERMANY
关键词
D O I
10.1063/1.360553
中图分类号
O59 [应用物理学];
学科分类号
摘要
The influence of the electrodes on the dielectric behavior and especially on the leakage behavior of SrTiO3 thin films was investigated by impedance analysis. Based on measurements on thin films with different electrode materials the work function of these materials was found to determine the leakage currents. The main conduction mechanism is thermionic emission of electrons from the cathode into the SrTiO3 thin film. The current-voltage characteristics are influenced by the Schottky effect. (C) 1995 American Institute of Physics.
引用
收藏
页码:6113 / 6121
页数:9
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