ELECTRODE INFLUENCE ON THE CHARGE-TRANSPORT THROUGH SRTIO3 THIN-FILMS

被引：219

作者：

DIETZ, GW ^{[1
]}

ANTPOHLER, W ^{[1
]}

KLEE, M ^{[1
]}

WASER, R ^{[1
]}

机构：

[1] PHILIPS GMBH,FORSCHUNGSLAB,D-52066 AACHEN,GERMANY

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 78卷 / 10期

关键词：

D O I：

10.1063/1.360553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The influence of the electrodes on the dielectric behavior and especially on the leakage behavior of SrTiO3 thin films was investigated by impedance analysis. Based on measurements on thin films with different electrode materials the work function of these materials was found to determine the leakage currents. The main conduction mechanism is thermionic emission of electrons from the cathode into the SrTiO3 thin film. The current-voltage characteristics are influenced by the Schottky effect. (C) 1995 American Institute of Physics.

引用

页码：6113 / 6121

页数：9

共 48 条

[21] PROCESSING AND ELECTRICAL-PROPERTIES OF PB(ZRXTI1-X)O3 (X = 0.2-0.75) FILMS - COMPARISON OF METALLOORGANIC DECOMPOSITION AND SOL-GEL PROCESSES
KLEE, M
EUSEMANN, R
WASER, R
BRAND, W
VANHAL, H
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (04) : 1566 - 1576
[22] KLIERN H, 1988, THESIS AACHEN U TECH
[23] CONDUCTION MECHANISMS IN BATIO3 THIN-FILMS
LI, P
LU, TM
[J]. PHYSICAL REVIEW B, 1991, 43 (17): : 14261 - 14264
[24] THEORY OF CONDUCTION IN ZNO VARISTORS
MAHAN, GD
LEVINSON, LM
PHILIPP, HR
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (04) : 2799 - 2812
[25] ELECTRICAL CHARACTERISTICS OF FERROELECTRIC PZT THIN-FILMS FOR DRAM APPLICATIONS
MOAZZAMI, R
HU, CM
SHEPHERD, WH
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (09) : 2044 - 2049
[26] ODWYER JJ, 1973, THEORY ELECTRICAL CO
[27] SCHAFER B, 1994, THESIS RWTH AACHEN U
[28] SCHUMACHER M, 1995, 6TH P ISIF
[29] Scott J. F., 1994, Integrated Ferroelectrics, V4, P85, DOI 10.1080/10584589408018662
[30] Scott J. F., 1992, Integrated Ferroelectrics, V1, P323, DOI 10.1080/10584589208215720

← 1 2 3 4 5 →