ON THE DOPING EFFICIENCY OF NITROGEN IN HYDROGENATED AMORPHOUS-GERMANIUM

被引：17

作者：

CHAMBOULEYRON, I

ZANATTA, AR

机构：

[1] Instituto de Física, Universidade Estadual de Campinas, UNICAMP, Campinas, S. P., 13081

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.108818

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports on the doping efficiency of nitrogen in a-Ge:H films of electronic quality. It has been found that nitrogen is an effective dopant in the a-Ge:H network, its doping efficiency being similar to the one corresponding to phosphorus in a-Si:H. The concentration of active nitrogen atoms decreases with impurity content following a square root dependence on total nitrogen. This behavior is similar to the one determined for column V dopants in a-Si:H films of electronic quality.

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页码：58 / 60

页数：3

相关论文

共 11 条

[1] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM [J].

CARDONA, M .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :463-481

[2] DOPING EFFICIENCY IN RF-SPUTTERED HYDROGENATED AMORPHOUS-SILICON [J].

JOUSSE, D ;

BRUYERE, JC ;

BUSTARRET, E ;

DENEUVILLE, A .

PHILOSOPHICAL MAGAZINE LETTERS, 1987, 55 (01) :41-46

[3] ELECTRONS IN DISORDERED STRUCTURES [J].

MOTT, NF .

ADVANCES IN PHYSICS, 1967, 16 (61) :49-+

[4] STRUCTURE OF AMORPHOUS (GE,SI)1-XYX ALLOYS [J].

PHILLIPS, JC .

PHYSICAL REVIEW LETTERS, 1979, 42 (17) :1151-1154

[5] THEORY OF DEFECTS IN AMORPHOUS-SEMICONDUCTORS [J].

ROBERTSON, J .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 :37-46

[6] ELECTRONIC-STRUCTURE OF SILICON-NITRIDE [J].

ROBERTSON, J .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (01) :47-77

[7] SUBSTITUTIONAL DOPING OF AMORPHOUS SILICON [J].

SPEAR, WE ;

LECOMBER, PG .

SOLID STATE COMMUNICATIONS, 1975, 17 (09) :1193-1196

[8]

STREET RA, 1982, PHYS REV LETT, V49, P1190

[9] THE DOPING EFFICIENCY IN AMORPHOUS-SILICON AND GERMANIUM [J].

STUTZMANN, M .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 53 (01) :L15-L21

[10] THE EFFECT OF NITROGEN DOPING ON AMORPHOUS-GERMANIUM [J].

TAKANO, Y ;

SATO, T ;

KITAOKA, N ;

OZAKI, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 55 (03) :325-333