ELECTRON-BEAM INDUCED CURRENT TECHNIQUE IMAGING APPLIED TO SURFACE-REACTION STUDY

被引：0
|
作者：
DAUCHOT, JP
DATH, JP
机构：
来源：
THIN SOLID FILMS | 1989年 / 176卷 / 01期
关键词：
D O I：
10.1016/0040-6090(89)90375-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：L157 / L160
页数：4
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