INCREASING THE TIME CONSTANT OF A THIN-FILM MULTIJUNCTION THERMAL CONVERTER FOR LOW-FREQUENCY APPLICATION

被引:18
作者
KLONZ, M
WEIMANN, T
机构
[1] Physikalisch-Technische Bundesanstalt
关键词
D O I
10.1109/TIM.1990.1032957
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the purpose of optimization of the PTB thin film multijunction thermal converter (MJTC) for low frequency application, a thermal mass is added to the heater area in order to increase the time constant of the MJTC from 30 ms to 3 s or more. An obelisk of silicon remains underneath the heater during the anisotropic etching process in which the silicon underneath the thermocouples is removed. The low frequency ac-dc current transfer difference is reduced from 350 x 10(-6) to less than 1 x 10(-6) at 10 Hz.
引用
收藏
页码:350 / 351
页数:2
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