ON THE CHEMICAL SPUTTERING OF OXYGEN-EXPOSED MOLYBDENUM

被引：22

作者：

SAIDOH, M ^{[1
]}

GNASER, H ^{[1
]}

HOFER, WO ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, EURATOM ASSOC, D-5170 JULICH 1, FED REP GER

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 40卷 / 04期

关键词：

D O I：

10.1007/BF00616594

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：197 / 202

页数：6

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