ON THE CHEMICAL SPUTTERING OF OXYGEN-EXPOSED MOLYBDENUM

被引：22
作者：
SAIDOH, M [1 ]
GNASER, H [1 ]
HOFER, WO [1 ]
机构：
[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, EURATOM ASSOC, D-5170 JULICH 1, FED REP GER
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 40卷 / 04期
关键词：
D O I：
10.1007/BF00616594
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：197 / 202
页数：6
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