PROPERTIES OF RF-SPUTTERED ZINC-OXIDE BASED THIN-FILMS MADE FROM DIFFERENT TARGETS

被引：27

作者：

MARTINEZ, MA

HERRERO, J

GUTIERREZ, MT

机构：

[1] Instituto de Energías Renovables (CIEMAT), 28040 Madrid, Avda. Complutense

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1994年 / 31卷 / 04期

关键词：

D O I：

10.1016/0927-0248(94)90191-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

The effect of deposition parameters on optoelectronic and structural properties of ZnO based thin films prepared by RF magnetron sputtering have been studied. Different targets (pure Zn. ZnO, Zn-Al (98/2 at%), ZnO-Al (98/2 at%), and ZnO-Al2O3 (98/2 wt%)) have been investigated to compare resulting samples and establish the best target composition. From reactive sputtering, using a Zn-Al target, transparent conductive zinc oxide has been obtained at 380-degrees-C with E(g) = 3.25-3.35 eV and rho = 4.8 X 10(-4) OMEGA cm. Reduction of substrate temperature at 200-degrees-C has been possible by nonreactive sputtering from ZnO-Al and ZnO-Al2O3 targets. The values of the energy gap and resistivity under these conditions are 3.30-3.35 eV and 1 X 10(-3) OMEGA cm respectively.

引用

页码：489 / 498

页数：10

共 21 条

[1]

BRETT MJ, 1986, APPL OPTICS, V25, P2712, DOI 10.1364/AO.25.002712

[2] ELECTRICAL AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM [J].

CLARK, AH .

PHYSICAL REVIEW, 1967, 154 (03) :750-&

[3] STRUCTURE AND PROPERTIES OF HIGH-EFFICIENCY ZNO CDZNS CUINGASE2 SOLAR-CELLS [J].

DEVANEY, WE ;

CHEN, WS ;

STEWART, JM ;

MICKELSEN, RA .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (02) :428-433

[4] OPTICAL-PROPERTIES OF ZNO - AL FILMS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING [J].

GHOSH, S ;

SARKAR, A ;

CHAUDHURI, S ;

PAL, AK .

VACUUM, 1991, 42 (10-11) :645-648

[5] OPTICAL INTERFERENCE METHOD FOR APPROXIMATE DETERMINATION OF REFRACTIVE-INDEX AND THICKNESS OF A TRANSPARENT LAYER [J].

GOODMAN, AM .

APPLIED OPTICS, 1978, 17 (17) :2779-2787

[6]

Guillemoles J.-F., 1991, Tenth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference, P609

[7] TEXTURED FLUORINE-DOPED ZNO FILMS BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION AND THEIR USE IN AMORPHOUS-SILICON SOLAR-CELLS [J].

HU, JH ;

GORDON, RG .

SOLAR CELLS, 1991, 30 (1-4) :437-450

[8] POSTDEPOSITION ANNEALING EFFECTS IN RF REACTIVE MAGNETRON SPUTTERED INDIUM TIN OXIDE THIN-FILMS [J].

MARTINEZ, MA ;

HERRERO, J ;

GUTIERREZ, MT .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 26 (04) :309-321

[9]

MARTINEZ MA, 1992, 6TH INT PHOT SCI ENG, P281

[10]

Mauch R. H., 1991, Tenth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference, P1415

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