KINETICS OF OXYGEN DISSOCIATION ON SI(111)7X7 INVESTIGATED WITH OPTICAL 2ND-HARMONIC GENERATION

被引:47
作者
BRATU, P
KOMPA, KL
HOFER, U
机构
[1] Max-Planck-Institut für Quantenoptik
来源
PHYSICAL REVIEW B | 1994年 / 49卷 / 19期
关键词
D O I
10.1103/PhysRevB.49.14070
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Optical second-harmonic generation is used as a sensitive, nondestructive probe for the thermally activated dissociation of molecular oxygen on Si(111)7 x 7. Isothermal measurements show that the dissociation kinetics strongly depend on the total oxygen coverage. At room temperature the 1/e lifetime of chemisorbed O2 is approximately 15 min for saturation coverage but approximately 50 min for low oxygen coverage. The temperature dependence of the dissociation rates between 80 and 500 K indicates that more than one dissociation channel and/or molecular oxygen species exist on the surface.
引用
收藏
页码:14070 / 14073
页数:4
相关论文
共 28 条
  • [1] ATOM-RESOLVED SURFACE-CHEMISTRY - THE EARLY STEPS OF SI(111)-7X7 OXIDATION
    AVOURIS, P
    LYO, IW
    BOZSO, F
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 424 - 430
  • [2] AVOURIS P, 1992, AIP CONF PROC, V241, P283
  • [3] THERMAL AND PHOTOCHEMICAL OXIDATION OF SI(111) - DOPING EFFECT AND THE REACTION-MECHANISM
    BOZSO, F
    AVOURIS, P
    [J]. PHYSICAL REVIEW B, 1991, 44 (16): : 9129 - 9132
  • [4] OXIDATION OF THE SI(111) (7X7) SURFACE - ELECTRON-ENERGY LOSS SPECTROSCOPY, LOW-ENERGY ELECTRON-DIFFRACTION, AND AUGER-ELECTRON SPECTROSCOPY STUDIES
    EDAMOTO, K
    KUBOTA, Y
    KOBAYASHI, H
    ONCHI, M
    NISHIJIMA, M
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1985, 83 (01) : 428 - 436
  • [5] ENGEL T, 1993, SURF SCI REP, V18, P91, DOI 10.1016/0167-5729(93)90016-I
  • [6] OXIDATION-KINETICS OF SI(111) 7X7 IN THE SUBMONOLAYER REGIME
    GUPTA, P
    MAK, CH
    COON, PA
    GEORGE, SM
    [J]. PHYSICAL REVIEW B, 1989, 40 (11): : 7739 - 7749
  • [7] HALL RB, 1990, CHEM PHYSICS SOLID S, V8, P87
  • [8] Heinz T. F., 1991, NONLINEAR SURFACE EL, P353
  • [9] STUDY OF SYMMETRY AND DISORDERING OF SI(111)-7X7 SURFACES BY OPTICAL 2ND HARMONIC-GENERATION
    HEINZ, TF
    LOY, MMT
    THOMPSON, WA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05): : 1467 - 1470
  • [10] ADSORPTION OF MOLECULAR-OXYGEN ON SI(111)
    HOFER, U
    PUSCHMANN, A
    COULMAN, D
    UMBACH, E
    [J]. SURFACE SCIENCE, 1989, 211 (1-3) : 948 - 958