LIGHT-GUIDING STRUCTURES OF PHOTORESIST FILMS

被引：24
作者：
WEBER, HW
TOMLINSON, WJ
ULRICH, R
CHANDROSS, EA
机构：
来源：
APPLIED PHYSICS LETTERS | 1972年 / 20卷 / 03期
关键词：
D O I：
10.1063/1.1654082
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：143 / +
页数：1
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