Nitrided carbon stripper foils with excellent lifetimes and mechanical properties have been made by a new method based on reactive nitrogen-ion-beam sputtering. The foils showed no shrinkage and maintained mechanical flexibility during long periods of irradiation by ion beams. The average integrated current stripped by such foils before breakage was 75 mC using a 3.2 MeV Ne+ beam flux of 4-mu-A, 3.5 mm in diameter. This capability is about 30 times greater than commercially available carbon stripper foils. Details are given for the method of preparation and the compositions of the foils produced.