SILICON RADIATION DETECTOR ANALYSIS USING BACK ELECTRON-BEAM INDUCED CURRENT

被引:4
|
作者
GUYE, R [1 ]
JARRON, P [1 ]
机构
[1] CERN,CH-1211 GENEVA 23,SWITZERLAND
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1987年 / 253卷 / 03期
关键词
D O I
10.1016/0168-9002(87)90513-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:319 / 324
页数:6
相关论文
共 50 条
  • [1] SILICON RADIATION DETECTOR ANALYSIS USING BACK ELECTRON BEAM INDUCED CURRENT.
    Guye, R.
    Jarron, P.
    1600, (A253):
  • [2] OBLIQUE GRAIN-BOUNDARIES - ANALYSIS OF LIGHT AND ELECTRON-BEAM INDUCED CURRENT PROFILES IN SILICON
    MITTIGA, A
    CAPIZZI, M
    COLUZZA, C
    FROVA, A
    PARISI, V
    CAVALCOLI, D
    MORO, L
    PRUDENZIATI, M
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (09) : 4748 - 4750
  • [3] LIMITING CURRENT OF THE RELATIVISTIC ELECTRON-BEAM WITH RADIATION
    ABLEKOV, VK
    PUGACHEV, VP
    FROLOV, AM
    DOKLADY AKADEMII NAUK SSSR, 1980, 253 (02): : 326 - 329
  • [4] EFFECT OF ELECTRON-BEAM CURRENT ON RADIATION PRETREATMENT OF CELLULOSIC WASTES WITH ELECTRON-BEAM ACCELERATOR
    KUMAKURA, M
    KAETSU, I
    RADIATION PHYSICS AND CHEMISTRY, 1984, 23 (05): : 523 - 527
  • [5] FAILURE ANALYSIS OF MICROELECTRONICS - MEASUREMENT OF ELECTRON-BEAM INDUCED CURRENT
    MATSUNAMI, H
    FUYUKI, T
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1981, 36 (205): : 99 - 113
  • [6] DIGITAL ELECTRON-BEAM INDUCED CURRENT IMAGING - APPARATUS AND ANALYSIS
    SAWYER, WD
    BELL, RO
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (04): : 937 - 945
  • [7] ELECTRON-BEAM INDUCED CURRENT ANALYSIS OF INTEGRATED-CIRCUITS
    SCHICK, JD
    SCANNING ELECTRON MICROSCOPY, 1981, : 295 - 304
  • [8] TEMPERATURE-DEPENDENT ELECTRON-BEAM INDUCED CURRENT STUDY OF DEFECTS IN SILICON
    SEKIGUCHI, T
    KUSANAGI, S
    MIYAMURA, Y
    SUMINO, K
    ACTA PHYSICA POLONICA A, 1993, 83 (01) : 71 - 79
  • [9] Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
    Liu, Binghai
    Dong, Zhi Li
    Hua, Younan
    Fu, Chao
    Li, Xiaomin
    Tan, Pik Kee
    Zhao, Yuzhe
    AIP ADVANCES, 2018, 8 (11):
  • [10] AN INDUCED SHORT-WAVE-RADIATION OF HEAVY-CURRENT ELECTRON-BEAM
    MARTIROSYAN, GV
    ZHURNAL TEKHNICHESKOI FIZIKI, 1983, 53 (04): : 699 - 703