LOW-LOSS OPTICAL CHANNEL WAVE-GUIDES IN KNBO3 BY MULTIPLE ENERGY ION-IMPLANTATION

被引:25
作者
FLUCK, D [1 ]
GUNTER, P [1 ]
FLEUSTER, M [1 ]
BUCHAL, C [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, ISI FORSCHUNGSZENTRUM, W-5170 JULICH 1, GERMANY
关键词
D O I
10.1063/1.351689
中图分类号
O59 [应用物理学];
学科分类号
摘要
Permanent optical channel waveguides in single crystals of KNbO3 are formed with low-dose MeV He ion irradiation, A single energy implantation forms a confinement barrier at the projected range of the ions whereas multiple energy implantations combined with a positive shielding mask form the side walls. Guiding modes are produced and propagation losses as low as 1.0 dB/cm are measured without the need for any annealing. The irradiation induced refractive index changes that define the boundaries of the waveguiding channels are made visible with cross-polarized light microscopy.
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收藏
页码:1671 / 1675
页数:5
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