MEASUREMENTS OF SPUTTERING YIELDS FOR LOW-ENERGY PLASMA IONS

被引：0

作者：

NISHI, M ^{[1
]}

ROSENGAUS, E ^{[1
]}

YAMADA, M ^{[1
]}

SUCKEWER, S ^{[1
]}

机构：

[1] PRINCETON UNIV,PRINCETON,NJ 08540

来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1978年 / 23卷 / 07期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：894 / 894

页数：1

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