COMPUTED RESULTS FOR THE DEPOSITION RATES AND TRANSPORT PHENOMENA FOR AN MOCVD SYSTEM WITH A CONICAL ROTATING SUBSTRATE

被引：12
作者：
DILAWARI, AH
SZEKELY, J
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1989年 / 97卷 / 3-4期
关键词：
D O I：
10.1016/0022-0248(89)90582-4
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
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页码：777 / 791
页数：15
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