CONTINUOUS-WAVE CO2 LASER-ASSISTED HIGH-TEMPERATURE SUPERCONDUCTING FILM DEPOSITION BY EXCIMER LASER ABLATION

被引:2
作者
VONDERBURG, E
GRILL, W
DIEGEL, M
STAFAST, H
机构
[1] BATTELLE INST EV,AM ROEMERHOF 35,W-6000 FRANKFURT 90,GERMANY
[2] UNIV FRANKFURT,INST PHYS,W-6000 FRANKFURT,GERMANY
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1992年 / 13卷 / 01期
关键词
D O I
10.1016/0921-5107(92)90098-T
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Continuous-wave CO2-laser-induced local heating of SrTiO3(100) and polycrystalline ZrO2 substrate surfaces was applied to in-situ deposition of superconducting Y-Ba-Cu-O thin films by KrF laser ablation from superconducting targets. The high temperature superconducting films on SrTiO3 so far show T(c) = 90 K (R = 0), DELTA-T = 1 K (10-90%), T(c) (a.c. susceptibility) = 88.5 K and J(c) > 10(5) A cm-2 (for a film 1.4-mu-m thick structured by dye laser ablation). The potential of this method for in-situ film patterning is briefly discussed.
引用
收藏
页码:25 / 28
页数:4
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