DEEP ULTRAVIOLET ALSER ETCHING OF VIAS IN POLYIMIDE FILMS

被引：20

作者：

TREYZ, GV

SCARMOZZINO, R

OSGOOD, RM

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.101904

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：346 / 348

页数：3

共 15 条

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[3]

BRUCK SD, 1969, POLYM SCI, V6, P49

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[9] TEMPERATURE RISE INDUCED BY A LASER-BEAM [J].

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[10] CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES [J].

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