ATTEMPT TO UNDERSTAND PREFERENTIAL SPUTTERING

被引：148

作者：

KELLY, R

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90925-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：553 / 558

页数：6

共 37 条

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