PLASMA ANODIZATION OF METALS AND SEMICONDUCTORS

被引:46
作者
OHANLON, JF
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 02期
关键词
D O I
10.1116/1.1315852
中图分类号
O59 [应用物理学];
学科分类号
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页码:330 / &
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