TRENCH ISOLATION TO ENHANCE PROGRAMMING EFFICIENCY AND ISOLATION IN HIGH-DENSITY ULSI EPROM

被引：0

作者：

ESQUIVEL, AL ^{[1
]}

MITCHELL, AT ^{[1
]}

PATERSON, JL ^{[1
]}

TIGELAAR, HL ^{[1
]}

RIEMENSCHNEIDER, BR ^{[1
]}

DEVOUT, DW ^{[1
]}

SHAH, P ^{[1
]}

COFFMAN, TM ^{[1
]}

GILL, M ^{[1
]}

LAHIRY, R ^{[1
]}

MCELROY, D ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,CTR SEMICOND PROC & DEV,DALLAS,TX 75265

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C121 / C121

页数：1

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