ANOMALOUS LARGE GRAINS IN ALLOYED ALUMINUM THIN-FILMS .2. ELECTROMIGRATION AND DIFFUSION IN THIN-FILMS WITH VERY LARGE GRAINS

被引：50

作者：

GANGULEE, A ^{[1
]}

DHEURLE, FM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

THIN SOLID FILMS | 1973年 / 16卷 / 02期

关键词：

D O I：

10.1016/0040-6090(73)90171-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：227 / 236

页数：10

共 26 条

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