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GROWTH OF DIAMOND THIN-FILMS BY SPIRAL HOLLOW-CATHODE PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION
被引:10
|
作者
:
KUNG, PJ
论文数:
0
引用数:
0
h-index:
0
KUNG, PJ
TZENG, Y
论文数:
0
引用数:
0
h-index:
0
TZENG, Y
机构
:
来源
:
JOURNAL OF APPLIED PHYSICS
|
1989年
/ 66卷
/ 10期
关键词
:
D O I
:
10.1063/1.343824
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:4676 / 4684
页数:9
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