GETTER SPUTTERING - REVIEW

被引：8
作者：
HOLLAND, L
COX, REL
机构：
[1] BRUNEL UNIV,PHYS DEPT,UXBRIDGE,ENGLAND
[2] EDWARDS HIGH VACUUM INT,CRAWLEY,SUSSEX,ENGLAND
来源：
VACUUM | 1974年 / 24卷 / 03期
关键词：
D O I：
10.1016/0042-207X(74)92453-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：107 / 116
页数：10
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