ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .1. SI-28+ IMPLANTATION

被引：28
作者：
GALUSKA, AA
机构：
[1] Sandia Natl Lab, United States
来源：
APPLIED SURFACE SCIENCE | 1989年 / 40卷 / 1-2期
关键词：
29;
D O I：
10.1016/0169-4332(89)90155-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：19 / 31
页数：13
相关论文
共 29 条
[21]  
MITCHELL IV, 1984, P MRS S THIN FILMS I, P189
[22]   COMPARISON OF THE CKLL 1ST-DERIVATIVE AUGER-SPECTRA FROM XPS AND AES USING DIAMOND, GRAPHITE, SIC AND DIAMOND-LIKE-CARBON FILMS [J].
MIZOKAWA, Y ;
MIYASATO, T ;
NAKAMURA, S ;
GEIB, KM ;
WILMSEN, CW .
SURFACE SCIENCE, 1987, 182 (03) :431-438
[23]   CHEMICAL-STATE EFFECTS IN AUGER-ELECTRON SPECTROSCOPY [J].
RYE, RR ;
MADEY, TE ;
HOUSTON, JE ;
HOLLOWAY, PH .
JOURNAL OF CHEMICAL PHYSICS, 1978, 69 (04) :1504-1512
[24]   SMOOTHING + DIFFERENTIATION OF DATA BY SIMPLIFIED LEAST SQUARES PROCEDURES [J].
SAVITZKY, A ;
GOLAY, MJE .
ANALYTICAL CHEMISTRY, 1964, 36 (08) :1627-&
[25]   CHARACTERIZATION OF THE TREATED SURFACES OF SILICON ALLOYED PYROLYTIC CARBON AND SIC [J].
SMITH, KL ;
BLACK, KM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :744-747
[26]   ADHESION TESTING BY THE SCRATCH TEST METHOD - THE INFLUENCE OF INTRINSIC AND EXTRINSIC PARAMETERS ON THE CRITICAL LOAD [J].
STEINMANN, PA ;
TARDY, Y ;
HINTERMANN, HE .
THIN SOLID FILMS, 1987, 154 (1-2) :333-349
[27]  
Wagner C.D., 1979, HDB XRAY PHOTOELECTR
[28]   ADHESION OF THIN-FILMS [J].
WEAVER, C .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :18-25
[29]   IMPROVEMENT OF THERMALLY FORMED NICKEL SILICIDE BY ION IRRADIATION. [J].
Wielunski, L.S. ;
Lien, C.D. ;
Liu, B.X. ;
Nicolet, M.A. .
Journal of vacuum science & technology, 1982, 20 (02) :182-185
123