ION-ENHANCED ADHESION OF NI FILMS ON GLASSY-CARBON .1. SI-28+ IMPLANTATION

被引：28
作者：
GALUSKA, AA
机构：
[1] Sandia Natl Lab, United States
来源：
APPLIED SURFACE SCIENCE | 1989年 / 40卷 / 1-2期
关键词：
29;
D O I：
10.1016/0169-4332(89)90155-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：19 / 31
页数：13
相关论文
共 29 条
[1]   EVALUATION OF ADHESION STRENGTH OF THIN HARD COATINGS [J].
ARAI, T ;
FUJITA, H ;
WATANABE, M .
THIN SOLID FILMS, 1987, 154 (1-2) :387-401
[2]   SEMICONDUCTOR POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF GERMANIUM CHEMICAL BONDING [J].
ATANASOSKA, L ;
MEYER, HM ;
ANDERSON, SG ;
WEAVER, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2175-2181
[3]   ALUMINUM POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SELECTIVE CHEMICAL BONDING [J].
ATANASOSKA, L ;
ANDERSON, SG ;
MEYER, HM ;
LIN, Z ;
WEAVER, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06) :3325-3333
[4]   ION-BEAM BONDING OF THIN-FILMS [J].
BAGLIN, JEE ;
CLARK, GJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :881-885
[5]   METAL-POLYMER INTERFACES - ADHESION AND X-RAY PHOTOEMISSION-STUDIES [J].
BURKSTRAND, JM .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4795-4800
[6]   THE RELATIONSHIP BETWEEN HARDNESS AND SCRATCH ADHESION [J].
BURNETT, PJ ;
RICKERBY, DS .
THIN SOLID FILMS, 1987, 154 (1-2) :403-416
[7]  
CRANMER DC, 1986, ADV CERAM MATER, V1, P247
[8]  
DAVIS LE, 1976, HDB AUGER ELECTRON S
[9]  
DYE RR, 1980, J CHEM PHYS, V73, P4867
[10]   CHARACTERIZATION OF AMORPHOUS SIOX LAYERS WITH ESCA [J].
FINSTER, J ;
SCHULZE, D ;
MEISEL, A .
SURFACE SCIENCE, 1985, 162 (1-3) :671-679
123