ELECTRICAL CHARACTERISTICS OF TI-SI(100) INTERFACES

被引：2

作者：

ABOELFOTOH, MO ^{[1
]}

STOLT, L ^{[1
]}

PETERSSON, CS ^{[1
]}

机构：

[1] ROYAL INST TECHNOL,DEPT SOLID STATE ELECTR,S-10044 STOCKHOLM 70,SWEDEN

来源：

THIN SOLID FILMS | 1989年 / 176卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90090-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：173 / 179

页数：7

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