ELECTRICAL CHARACTERISTICS OF TI-SI(100) INTERFACES

被引：2
|
作者：
ABOELFOTOH, MO [1 ]
STOLT, L [1 ]
PETERSSON, CS [1 ]
机构：
[1] ROYAL INST TECHNOL,DEPT SOLID STATE ELECTR,S-10044 STOCKHOLM 70,SWEDEN
来源：
THIN SOLID FILMS | 1989年 / 176卷 / 02期
关键词：
D O I：
10.1016/0040-6090(89)90090-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：173 / 179
页数：7
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