ION-BEAM-ASSISTED DEPOSITION AND ION-BEAM SYNTHESIS OF WEAR RESISTANT COATINGS ON TECHNICAL SURFACES

An ion implanter with a non-mass-separated ion beam, already used for experiments as well as industrial applications, was equipped with an electron-gun evaporator to allow for simultaneous or sequential implantation and coating. Using this equipment, ion-beam-assisted deposition (IBAD) of different layers, and in particular the formation of layers of TiN on steel with very good adhesion, was possible. To produce TiN, titanium was evaporated and nitrogen was implanted. The maximum growth rate of the TiN films was 1 nm s-1. Examinations showed superior wear properties in comparison with ion-plated layers and an unusual high Knoop micro-hardness. Under certain experimental conditions, the stoichiometric ratio was found to be 1:1 even if the ion density was varied slightly, making the IBAD process easily controllable. The layers did not have the yellow color typical of ion-plated TiN layers but were neutral gray. Nevertheless, electron diffraction investigations confirmed the typical crystalline structure of TiN. Analytical investigations were performed and compared with those of ion-plated TiN. Details of the equipment, including operation conditions, as well as experimental results of film properties will be reported.