ELECTRONIC-STRUCTURE IN CONFINED VOLUMES USING SPATIALLY RESOLVED ELECTRON-ENERGY LOSS SCATTERING

被引：3
作者：
BATSON, PE
机构：
[1] IBM Thomas J. Watson Research Center, Yorktown Heights
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1992年 / 14卷 / 03期
关键词：
D O I：
10.1016/0921-5107(92)90312-W
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The instrumental requirements, spectral processing and interpretation for spatially resolved electron energy loss scattering appropriate for electronic structure determinations are reviewed. As an example, the recent Si L2,3 absorption spectra obtained with 0.2 eV resolution in Ge-Si alloy layers 5-50 nm thick are discussed.
引用
收藏
页码：297 / 303
页数：7
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