EFFECTS OF GROWTH-RATE AND MERCURY PARTIAL-PRESSURE ON TWIN FORMATION IN HGCDTE (111) LAYERS GROWN BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引:12
作者
SHIGENAKA, K [1 ]
SUGIURA, L [1 ]
NAKATA, F [1 ]
HIRAHARA, K [1 ]
机构
[1] TOSHIBA CO LTD,CTR R&D,KOMULAI WORKS,SAIWAI KU,KAWASAKI 210,JAPAN
关键词
CDTE; HGCDTE; MOVPE; TEM; TWIN FORMATION;
D O I
10.1007/BF02817499
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The relationship between twin formation and the growth conditions for (111) HgCdTe epitaxial layers grown by metalorganic chemical vapor deposition was investigated. The existence of twins was confirmed by x-ray diffraction and cross-sectional transmission electron microscopy. The x-ray diffraction intensity of the 180-degrees-0 rotated 422 asymmetric reflection with that of the 422 asymmetric reflection was compared to detect the presence of twins. The layer obtained using a low growth rate and a low Hg partial pressure showed double-positioning (DP) twins. The twins became lamellar as the growth rate increased. Twin-free HgCdTe epitaxial layers were obtained under a high growth rate and a high Hg partial pressure. These results suggest a model for twin formation based on the difference in the growth mechanism of HgTe and CdTe. Twin-free (111) HgCdTe epitaxial layers were reproducibly obtained without using inclined substrates by optimizing the growth conditions by using this model.
引用
收藏
页码:865 / 871
页数:7
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