SMOOTH MULTILAYER FILMS SUITABLE FOR X-RAY MIRRORS

被引：63

作者：

HAELBICH, RP ^{[1
]}

SEGMULLER, A ^{[1
]}

SPILLER, E ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 03期

关键词：

D O I：

10.1063/1.90743

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer coatings consisting of very smooth ReW and carbon films used as near-normal-incidence reflectors show theoretical performance in the 150-200-Å wavelength region and should allow the fabrication of useful normal-incidence mirrors for wavelengths as short as 50 Å.

引用

页码：184 / 186

页数：3

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