FEMTOSECOND UV EXCIMER LASER ABLATION

被引：305

作者：

KUPER, S

STUKE, M

机构：

来源：

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1987年 / 44卷 / 04期

关键词：

D O I：

10.1007/BF00692122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：199 / 204

页数：6

共 18 条

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LANKARD, JR ;

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APPLIED PHYSICS LETTERS, 1987, 50 (15) :1019-1021

[4] TIME RESOLVED TRANSMISSION STUDIES OF POLY(METHYL METHACRYLATE) FILMS DURING ULTRAVIOLET-LASER ABLATIVE PHOTODECOMPOSITION [J].

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GOWER, MC .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) :2090-2092

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DYER, PE ;

SIDHU, J .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422

[6] DEEP UV SUB-MICRON LITHOGRAPHY BY USING A PULSED HIGH-POWER EXCIMER LASER [J].

KAWAMURA, Y ;

TOYODA, K ;

NAMBA, S .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6489-6490

[7] EFFECTIVE DEEP ULTRAVIOLET PHOTOETCHING OF POLY(METHYL METHACRYLATE BY AN EXCIMER LASER [J].

KAWAMURA, Y ;

TOYODA, K ;

NAMBA, S .

APPLIED PHYSICS LETTERS, 1982, 40 (05) :374-375

[8] TEMPORAL MEASUREMENTS OF PHOTOFRAGMENT ATTENUATION AT 248 NM IN THE LASER ABLATION OF POLYIMIDE IN AIR [J].

KOREN, G .

APPLIED PHYSICS LETTERS, 1987, 50 (16) :1030-1032

[9]

KUPER S, UNPUB

[10]

KUPER S, IN PRESS

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