SINGLE SCAN DEFECT IDENTIFICATION BY DEEP LEVEL TRANSIENT SPECTROSCOPY USING A 2-PHASE LOCK-IN AMPLIFIER (IQ-DLTS)

被引：17
作者：
AURET, FD
NEL, M
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.340047
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：973 / 976
页数：4
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