SINGLE SCAN DEFECT IDENTIFICATION BY DEEP LEVEL TRANSIENT SPECTROSCOPY USING A 2-PHASE LOCK-IN AMPLIFIER (IQ-DLTS)

被引：17

作者：

AURET, FD

NEL, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期

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D O I：

10.1063/1.340047

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：973 / 976

页数：4

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