PROTON IMPLANTED WAVE-GUIDES IN LINBO3, KNBO3 AND BATIO3

被引:53
作者
MORETTI, P
THEVENARD, P
WIRL, K
HERTEL, P
HESSE, H
KRATZIG, E
GODEFROY, G
机构
[1] UNIV LYON 1,DEPT PHYS MAT,F-69622 VILLEURBANNE,FRANCE
[2] UNIV BOURGOGNE,PHYS SOLIDE LAB,F-21004 DIJON,FRANCE
[3] UNIV OSNABRUCK,FACHBEREICH PHYS,W-4500 OSNABRUCK,GERMANY
关键词
D O I
10.1080/00150199208015059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By using a Van De Graaf accelerator, planar waveguides in LiNbO3, KNbO3, and BaTiO3 are fabricated (at 300 K) by thermally controlled proton implantation. The waveguide properties are investigated by dark line mode spectroscopy. The reconstructed profiles closely follow the ion concentration profiles as determined by simulation (TRIM).
引用
收藏
页码:13 / 18
页数:6
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