VERIFICATION OF A POLARIZATION-INSENSITIVE OPTICAL INTERFEROMETER SYSTEM WITH SUBNANOMETRIC CAPABILITY

被引：9

作者：

DOWNS, MJ

BIRCH, KP

COX, MG

NUNN, JW

机构：

[1] National Physical Laboratory, Teddington, Middlesex

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1995年 / 17卷 / 02期

关键词：

D O I：

10.1016/0141-6359(94)00004-J

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The performance of a length-measuring interferometer system designed to be insensitive to stray reflections and polarization effects resulting in a subnanometric measurement capability is described. Results from the mathematical analysis of the interferometer signals, which provided accurate fringe subdivision and allowed a 1 sigma of 0.15 nm to be realized from this system, are also described. The motion of a piezoelectric transducer (PZT) was characterized over a 1-mu m range using the system, and the results were used to confirm this subnanometric measurement capability of the interferometer.

引用

页码：84 / 88

页数：5

共 11 条

[1]

Downs, Rowley, A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability, Prec Eng, 15, pp. 281-286, (1993)

[2]

Downs, A proposed design for an optical interferometer with subnanometric resolution, Nanotechnology, 1, pp. 27-30, (1990)

[3]

Rosenbluth, Bobroff, Optical sources of non-lienarity in heterodyne interferometers, Precision Engineering, 12, pp. 7-11, (1990)

[4]

Tanaka, Yamagani, Nakayama, Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometre levels, IEEE Trans on Instru and Meas, 38, pp. 552-554, (1989)

[5]

Heydemann, Determination and correction of quadrature fringe measurement errors in interferometers, Appl Opt, 20, pp. 3,382-3,384, (1981)

[6]

Birch, Optical fringe subdivision with nanometric accuracy, Prec Eng, 12, pp. 195-198, (1990)

[7]

Birch, The precise determination of refractometric parameters for atmospheric gases, Ph.D. Thesis, (1988)

[8]

Anthony, Cox, The National Physical Laboratory's Data Approximation Subroutine Library, Algorithms for Approximation, pp. 669-687, (1987)

[9]

Cox, The NPL Data Approximation Subroutine Library: Current and planned facilities, NAG Newsletter, 2, pp. 3-16, (1987)

[10]

Clenshaw, Hayes, Curve and surface fitting, IMA Journal of Applied Mathematics, 1, pp. 164-183, (1963)

← 1 2 →