ORIENTED ALUMINUM NITRIDE THIN-FILMS DEPOSITED BY PULSED-LASER ABLATION

被引：68

作者：

NORTON, MG

KOTULA, PG

CARTER, CB

机构：

[1] Department of Materials Science and Engineering, Cornell University, Ithaca

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 05期

关键词：

D O I：

10.1063/1.349352

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single-phase aluminum nitride thin films with preferred crystallographic orientations have been grown on single-crystal sapphire by pulsed-laser ablation. The orientation of the films was found to be determined by the atmosphere and the nitrogen pressure during deposition and the substrate temperature. The films were examined by x-ray diffraction, and scanning electron microscopy.

引用

收藏

页码：2871 / 2873

页数：3

相关论文

共 13 条

[1] REDUCED SPLASHING EFFECT IN LASER ABLATED SUPERCONDUCTING THIN-FILMS FORMED FROM A MELT-QUENCHED NONSUPERCONDUCTING AMORPHOUS TARGET [J].

AGOSTINELLI, E ;

BOHANDY, J ;

GREEN, WJ ;

KIM, BF ;

ADRIAN, FJ ;

MOORJANI, K .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (10) :2075-2078

[2]

BOROM MP, 1972, B AM CERAM SOC, V51, P852

[3] GROWTH OF THIN-FILMS BY LASER-INDUCED EVAPORATION [J].

CHEUNG, JT ;

SANKUR, H .

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 15 (01) :63-109

[4]

DUFFY MT, 1978, HETEROEPITAXIAL SEMI

[5] ALN SUBSTRATES WITH HIGH THERMAL-CONDUCTIVITY [J].

KUROKAWA, Y ;

UTSUMI, K ;

TAKAMIZAWA, H ;

KAMATA, T ;

NOGUCHI, S .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1985, 8 (02) :247-252

[6] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF AIN FILMS [J].

LI, X ;

TANSLEY, TL .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (10) :5369-5371

[7] SINGLE-PHASE ALUMINUM NITRIDE FILMS BY DC-MAGNETRON SPUTTERING [J].

MORGAN, JS ;

BRYDEN, WA ;

KISTENMACHER, TJ ;

ECELBERGER, SA ;

POEHLER, TO .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2677-2681

[8] ON THE OPTIMIZATION OF THE LASER ABLATION PROCESS FOR THE DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS [J].

NORTON, MG ;

CARTER, CB .

PHYSICA C, 1990, 172 (1-2) :47-56

[9] SURFACE PREPARATION FOR THE HETEROEPITACTIC GROWTH OF CERAMIC THIN-FILMS [J].

NORTON, MG ;

SUMMERFELT, SR ;

CARTER, CB .

APPLIED PHYSICS LETTERS, 1990, 56 (22) :2246-2248

[10]

NORTON MG, 1989, HYBRID CIRCUITS, V20, P18